Invention Grant
- Patent Title: Piezoelectric thin film resonator, filter, and duplexer
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Application No.: US15416283Application Date: 2017-01-26
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Publication No.: US10404230B2Publication Date: 2019-09-03
- Inventor: Hiroomi Kaneko , Hiroshi Kawakami , Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2016-042822 20160304
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/70 ; H01L41/047 ; H01L41/053 ; H03H9/17 ; H01L41/187

Abstract:
A piezoelectric thin film resonator includes: lower and upper electrodes located on a substrate and facing each other; a piezoelectric film sandwiched between the lower and upper electrodes and including lower and upper piezoelectric films, an outer outline of the upper piezoelectric film coinciding with or being located further out than an outer outline of a resonance region in a region surrounding the resonance region, the outer outline of the upper piezoelectric film being located further in than an outer outline of the lower piezoelectric film in the region; an insertion film interposed between the lower and upper piezoelectric films, located in an outer peripheral region within the resonance region, not located in a central region of the resonance region, and located on an upper surface of the lower piezoelectric film in the region; and a protective film located on the upper electrode in the resonance region, and located so as to cover an end face of the upper piezoelectric film and an upper surface of the insertion film in the region.
Public/Granted literature
- US20170257076A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND DUPLEXER Public/Granted day:2017-09-07
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