Invention Grant
- Patent Title: MEMS device and method for producing a MEMS device
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Application No.: US15826788Application Date: 2017-11-30
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Publication No.: US10405099B2Publication Date: 2019-09-03
- Inventor: Stefan Jost , Wolfgang Friza , Stefan Geissler , Soenke Pirk
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
- Current Assignee: INFINEON TECHNOLOGIES AUSTRIA AG
- Current Assignee Address: AT Villach
- Agency: Viering, Jentschura & Partner MBB
- Priority: DE102016123130 20161130
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R9/08 ; H04R19/02 ; B81B7/00 ; B81C1/00 ; H04R31/00 ; H04R19/00

Abstract:
A MEMS device is provided. The MEMS device includes a membrane, and at least one electrode arranged at a distance from the membrane. The at least one electrode includes a layer stack. The layer stack includes a first insulation layer, a first conductive layer arranged thereabove, a second insulation layer arranged thereabove, a second conductive layer arranged thereabove, and a third insulation layer arranged thereabove.
Public/Granted literature
- US20180152793A1 MEMS DEVICE AND METHOD FOR PRODUCING A MEMS DEVICE Public/Granted day:2018-05-31
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