Invention Grant
- Patent Title: Chemical mechanical polishing (CMP) composition comprising a polymeric polyamine
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Application No.: US14004689Application Date: 2012-03-19
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Publication No.: US10407594B2Publication Date: 2019-09-10
- Inventor: Bastian Marten Noller , Yuzhuo Li , Diana Franz , Kenneth Rushing , Michael Lauter , Daniel Kwo-Hung Shen , Yongqing Lan , Zhenyu Bao
- Applicant: Bastian Marten Noller , Yuzhuo Li , Diana Franz , Kenneth Rushing , Michael Lauter , Daniel Kwo-Hung Shen , Yongqing Lan , Zhenyu Bao
- Applicant Address: DE Ludwigshafen
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/IB2012/051292 WO 20120319
- International Announcement: WO2012/127398 WO 20120927
- Main IPC: H01L21/302
- IPC: H01L21/302 ; C03C25/68 ; C09G1/02 ; C09G1/16 ; H01L21/306

Abstract:
A chemical-mechanical polishing (CMP) composition comprising (A) inorganic particles, organic particles, or a composite or mixture thereof, (B) a polymeric polyamine or a salt thereof comprising at least one type of pendant group (Y) which comprises at least one moiety (Z), wherein (Z) is a carboxylate (—COOR1), sulfonate (—SO3R2), sulfate (—O—SO3R3), phosphonate (—P(═O)(OR4)(OR5)), phosphate (—O—P(═O)(OR6)(OR7)), carboxylic acid (—COOH), sulfonic acid (—SO3H), sulfuric acid (—O—SO3—), phosphonic acid (—P(═O)(OH)2), phosphoric acid (—O—P(═O)(OH)2) moiety, or their deprotonated forms, R1 is alkyl, aryl, alkylaryl, or arylalkyl R2 is alkyl, aryl, alkylaryl, or arylalkyl, R3 is alkyl, aryl, alkylaryl, or arylalkyl, R4 is alkyl, aryl, alkylaryl, or arylalkyl, R5 is H, alkyl, aryl, alkylaryl, or arylalkyl, R6 is alkyl, aryl, alkylaryl, or arylalkyl, R7 is H, alkyl, aryl, alkylaryl, or arylalkyl, and (C) an aqueous medium.
Public/Granted literature
- US20140004703A1 CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION COMPRISING A POLYMERIC POLYAMINE Public/Granted day:2014-01-02
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