Invention Grant
- Patent Title: Evaporation device
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Application No.: US15322540Application Date: 2016-04-15
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Publication No.: US10407765B2Publication Date: 2019-09-10
- Inventor: Liwei Guan
- Applicant: Boe Technology Group Co., Ltd. , Ordos Yuansheng Optoelectronics Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- Priority: CN201510272145 20150525
- International Application: PCT/CN2016/079437 WO 20160415
- International Announcement: WO2016/188266 WO 20161201
- Main IPC: C23C14/26
- IPC: C23C14/26 ; H01L51/56 ; C23C14/24 ; H01L51/00

Abstract:
An evaporation device has an evaporation material that can be uniformly heated when it is evaporated with the evaporation device. The evaporation device comprises: a crucible for loading an evaporation material, a body wall of the crucible comprising an inner wall and an outer wall, a chamber being formed between the inner wall and the outer wall, which is filled with an inorganic salt; and a heating element for heating the crucible. During the working process of the evaporation device, when the crucible is heated by the heating element, the inorganic salt inside the chamber would become a molten state under heating, and the inorganic salt in molten state which fills the chamber can conduct heat uniformly such that the temperature distribution of the inner wall of the crucible is more uniform during the heating process and the evaporation material can be heated more uniformly. A method of manufacturing an evaporation device and a usage of the evaporation device are also disclosed in this patent application.
Public/Granted literature
- US20180202038A1 EVAPORATION DEVICE Public/Granted day:2018-07-19
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