Invention Grant
- Patent Title: Uniform crack-free aluminum deposition by two step aluminum electroplating process
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Application No.: US15835067Application Date: 2017-12-07
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Publication No.: US10407789B2Publication Date: 2019-09-10
- Inventor: Balaji Ganapathy , Ankur Kadam , Prerna S. Goradia , Laksheswar Kalita , Tapash Chakraborty , Vijay Bhan Sharma
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Priority: IN201641041929 20161208
- Main IPC: C25D3/44
- IPC: C25D3/44 ; C25D5/44 ; C25D5/48 ; C25D5/18 ; C25D7/00 ; C25D5/50 ; C25D9/08 ; C25D11/04 ; C25D5/02

Abstract:
In one implementation, a method of depositing a material on a substrate is provided. The method comprises positioning an aluminum-containing substrate in an electroplating solution, the electroplating solution comprising a non-aqueous solvent and a deposition precursor. The method further comprises depositing a coating on the aluminum-containing substrate, the coating comprising aluminum or aluminum oxide. Depositing the coating comprises applying a first current for a first time-period to nucleate a surface of the aluminum-containing substrate and applying a second current for a second time-period, wherein the first current is greater than the second current and the first time-period is less than the second time-period to form the coating on the nucleated surface of the aluminum-containing substrate.
Public/Granted literature
- US20180163317A1 UNIFORM CRACK-FREE ALUMINUM DEPOSITION BY TWO STEP ALUMINUM ELECTROPLATING PROCESS Public/Granted day:2018-06-14
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