Invention Grant
- Patent Title: Mechanical quantity measurement device and pressure sensor using same
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Application No.: US15577394Application Date: 2016-07-29
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Publication No.: US10408692B2Publication Date: 2019-09-10
- Inventor: Kentarou Miyajima
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: JP Hitachinaka-shi
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka-shi
- Agency: Crowell & Moring LLP
- Priority: JP2015-192508 20150930
- International Application: PCT/JP2016/072251 WO 20160729
- International Announcement: WO2017/056671 WO 20170406
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01B7/16 ; G01L1/22 ; G01L9/00 ; G01L9/06 ; H01L29/84

Abstract:
Provided are a mechanical quantity measurement device having a higher signal-to-noise ratio and resolution than the prior art and a pressure sensor using the same. A mechanical quantity measurement device that is provided with a plurality of Wheatstone bridges on the main surface of a single semiconductor substrate that are composed from impurity-diffused resistors and detect the difference between the strain amount occurring in the x-axis direction and the strain amount occurring in the y-axis direction, which intersect at right angles on the main surface of the semiconductor substrate, said mechanical quantity measurement device being characterized in that the impurity-diffused resistors composing the plurality of Wheatstone bridges are disposed evenly in an area to be measured.
Public/Granted literature
- US20180164168A1 Mechanical Quantity Measurement Device and Pressure Sensor Using Same Public/Granted day:2018-06-14
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