Invention Grant
- Patent Title: Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus and moving object
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Application No.: US14987186Application Date: 2016-01-04
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Publication No.: US10408856B2Publication Date: 2019-09-10
- Inventor: Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-000681 20150106
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/08 ; G01P15/125
Abstract:
A physical quantity sensor includes a first sensor element, an outer edge portion arranged on at least a portion of the outer periphery of the first sensor element, in which a first groove portion extending in a first direction is provided on the outer edge portion when the outer edge portion is seen in plan view.
Public/Granted literature
Information query
