Invention Grant
- Patent Title: Light source device and inspection device
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Application No.: US15576389Application Date: 2016-05-10
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Publication No.: US10408874B2Publication Date: 2019-09-10
- Inventor: Tomonori Nakamura , Mitsunori Nishizawa
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2015-110187 20150529
- International Application: PCT/JP2016/063864 WO 20160510
- International Announcement: WO2016/194556 WO 20161208
- Main IPC: G01R31/265
- IPC: G01R31/265 ; G01R31/302 ; H01S5/50 ; G01R31/26 ; G01R31/311

Abstract:
A light source device includes a light source that generates incoherent light, and an optical amplifier having gain characteristics indicating a gain at each wavelength, which receives the incoherent light output by the light source as input light, and outputs amplified light obtained by amplifying the input light, and a central wavelength of an intensity distribution indicating an intensity at each wavelength of the input light is a wavelength longer than a central wavelength of the gain characteristics indicating a gain at each wavelength of the optical amplifier.
Public/Granted literature
- US20180156860A1 LIGHT SOURCE DEVICE AND INSPECTION DEVICE Public/Granted day:2018-06-07
Information query