Invention Grant
- Patent Title: Mold, imprint apparatus, and method of manufacturing article
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Application No.: US15003171Application Date: 2016-01-21
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Publication No.: US10409156B2Publication Date: 2019-09-10
- Inventor: Byung-Jin Choi , Mahadevan Ganapathisubramanian , Naoki Murasato , Yoshikazu Miyajima
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Main IPC: G03F7/00
- IPC: G03F7/00
Abstract:
A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.
Public/Granted literature
- US20160236400A1 MOLD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-08-18
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