Invention Grant
- Patent Title: Method for illuminating an object field of a projection exposure system
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Application No.: US15226189Application Date: 2016-08-02
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Publication No.: US10409167B2Publication Date: 2019-09-10
- Inventor: Martin Endres , Johannes Eisenmenger , Stig Bieling , Markus Hauf , Lars Wischmeier , Fabian Haacker
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102014203188 20140221
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03F7/20 ; G02B19/00 ; G02B26/08
Abstract:
A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.
Public/Granted literature
- US20160342094A1 METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SYSTEM Public/Granted day:2016-11-24
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