Invention Grant
- Patent Title: Temperature controller of semiconductor wafer and temperature control method of semiconductor wafer
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Application No.: US15459221Application Date: 2017-03-15
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Publication No.: US10409303B2Publication Date: 2019-09-10
- Inventor: Kazuhiro Mimura
- Applicant: Kelk Ltd.
- Applicant Address: JP Kanagawa
- Assignee: KELK Ltd.
- Current Assignee: KELK Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Fish & Richardson P.C.
- Priority: JP2016-052462 20160316
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G05D23/19 ; H01L21/67

Abstract:
A manipulated variable calculator having a plurality of control loops and configured to calculate manipulated variables to be respectively given to a plurality of temperature adjusters includes: a reference model output generator configured to generate a reference model that is a response output until reaching a temperature setpoint when, in the plurality of control loops, a manipulated variable of a control loop having the slowest response speed is defined as 100%; a simulator configured to sequentially search for a switching time to determine a manipulated variable pattern; a reference model configured to generate a reference model output based on the searched switching time; and a control switching unit configured to switch to a feed-back control using an error between the reference model outlet and the temperature setpoint when the reference model outlet reaches a predetermined time or a predetermined temperature after the reference model outlet starts.
Public/Granted literature
- US20170269616A1 TEMPERATURE CONTROLLER OF SEMICONDUCTOR WAFER AND TEMPERATURE CONTROL METHOD OF SEMICONDUCTOR WAFER Public/Granted day:2017-09-21
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