Invention Grant
- Patent Title: Method of resolving color conflicts for cell-based designs with multi-pattern lithography
-
Application No.: US14828485Application Date: 2015-08-17
-
Publication No.: US10409947B2Publication Date: 2019-09-10
- Inventor: David A. Petermann , Andrew P. Hoover , Chandrakanth Ramesh
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/70

Abstract:
According to one general aspect, a method may include receiving a data file that includes placement data regarding a plurality of circuit cells. The circuit cells may include respective layout portions. The layout portions may be associated with a plurality of respective lithographic colors. The method may include determining if a violating circuit cell is to be re-colored. The method may include indicating that, via at least one shape on a color swap layer in the data file, the violating circuit cell is to be at least partially re-colored. A color swap layer shape may cause a mask generator to re-color the portion of the violating circuit cell indicated by the color swap layer shape.
Public/Granted literature
- US20160147933A1 METHOD OF RESOLVING COLOR CONFLICTS FOR CELL-BASED DESIGNS WITH MULTI-PATTERN LITHOGRAPHY Public/Granted day:2016-05-26
Information query