Invention Grant
- Patent Title: Side gas injection kit for multi-zone gas injection assembly
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Application No.: US15989019Application Date: 2018-05-24
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Publication No.: US10410841B2Publication Date: 2019-09-10
- Inventor: Yan Rozenzon , Kyle Tantiwong , Imad Yousif , Vladimir Knyazik , Bojenna Keating , Samer Banna
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/455
Abstract:
A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.
Public/Granted literature
- US20180269038A1 Multi-Zone Gas Injection Assembly with Azimuthal and Radial Distribution Control Public/Granted day:2018-09-20
Information query
