Invention Grant
- Patent Title: Purge stocker and purging method
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Application No.: US15319724Application Date: 2015-04-21
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Publication No.: US10410894B2Publication Date: 2019-09-10
- Inventor: Shinji Onishi , Masanao Murata , Takashi Yamaji
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: Murata Machinery, Ltd.
- Current Assignee: Murata Machinery, Ltd.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP2014-123376 20140616
- International Application: PCT/JP2015/062132 WO 20150421
- International Announcement: WO2015/194252 WO 20151223
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67 ; H01L21/677 ; B08B9/08 ; G05D7/06

Abstract:
A purge stocker includes a first supply unit including N first purge apparatuses, each having a first supply unit configured to support a storage container, a first supply pipe configured to supply the purge gas into the storage container supported by the first supporting unit, and a first flow rate adjusting unit configured to adjust the flow rate of the purge gas in the first supply pipe; and a second supply unit including M second purge apparatuses, each having a second supporting unit configured to support the storage container and a second supply pipe configured to supply the purge gas into the storage container supported by the second supporting unit. When the storage containers are supported by a certain number of second supporting units, the second supply unit supplies the storage containers with the purge gas through the respective second supply pipes.
Public/Granted literature
- US20170140949A1 PURGE STOCKER AND PURGING METHOD Public/Granted day:2017-05-18
Information query
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