Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US15921857Application Date: 2018-03-15
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Publication No.: US10410902B2Publication Date: 2019-09-10
- Inventor: Yasuharu Sasaki , Akihito Fushimi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2013-238854 20131119
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
A plasma processing apparatus of processing a processing target object within a depressurized space is provided. The plasma processing apparatus includes a processing vessel that partitions a depressurizable space; a mounting table, provided within the processing vessel, having an electrostatic chuck which is for a focus ring and has three electrodes; a power supply configured to apply three AC voltages having different phases to the three electrodes, respectively, to adsorb a target object on the electrostatic chuck.
Public/Granted literature
- US20180204756A1 PLASMA PROCESSING APPARATUS Public/Granted day:2018-07-19
Information query
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