Invention Grant
- Patent Title: Multiple gate length device with self-aligned top junction
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Application No.: US15860840Application Date: 2018-01-03
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Publication No.: US10410929B2Publication Date: 2019-09-10
- Inventor: Hui Zang , Jianwei Peng , Yi Qi , Hsien-Ching Lo , Jerome Ciavatti , Ruilong Xie
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/8234 ; H01L29/08 ; H01L27/088 ; H01L29/66 ; H01L21/20

Abstract:
A method of manufacturing a vertical fin field effect transistor includes forming a first fin in a first device region of a substrate, forming a second fin in a second device region of the substrate, and forming a sacrificial gate having a first gate length adjacent to the first and second fins. After forming a block mask over the sacrificial gate within the first device region, a deposition step or an etching step is used to increase or decrease the gate length of the sacrificial gate within the second device region. Top source/drain junctions formed over the fins are self-aligned to the gate in each of the first and second device regions.
Public/Granted literature
- US20190206743A1 MULTIPLE GATE LENGTH DEVICE WITH SELF-ALIGNED TOP JUNCTION Public/Granted day:2019-07-04
Information query
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