Invention Grant
- Patent Title: Semiconductor device including air gaps and method for fabricating the same
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Application No.: US15211938Application Date: 2016-07-15
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Publication No.: US10411014B2Publication Date: 2019-09-10
- Inventor: Chang-Youn Hwang , Noh-Jung Kwak , Hong-Gu Yi , Yun-Je Choi , Se-Han Kwon , Ki-Soo Choi , Seung-Bum Kim , Do-Hyung Kim , Doo-Sung Jung , Dae-Sik Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2013-0134664 20131107; KR10-2014-0064625 20140528
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/764 ; H01L21/768 ; H01L21/3213 ; H01L45/00 ; H01L27/24 ; H01L23/522 ; H01L23/528 ; H01L23/535

Abstract:
Disclosed are a semiconductor device capable of reducing parasitic capacitance between adjacent conductive structures and a method for fabricating the same. The semiconductor device includes a plurality of bit line structures each comprising a first contact plug formed over a substrate and a bit line formed over the first contact plug. A spacer structure having air gaps is formed on sidewalls of the first contact plug and on sidewalls of the bit line. An plug isolation layer is formed between the plurality of bit line structures. The isolation layer includes an opening. A second contact plug is formed in the opening and a memory element is formed over the second contact plug.
Public/Granted literature
- US20160329337A1 SEMICONDUCTOR DEVICE INCLUDING AIR GAPS AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-11-10
Information query
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