Invention Grant
- Patent Title: Semiconductor structure
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Application No.: US16236787Application Date: 2018-12-31
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Publication No.: US10411023B2Publication Date: 2019-09-10
- Inventor: Yong Li
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201611067425 20161128
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/66 ; H01L29/78 ; H01L29/51 ; H01L21/28 ; H01L21/8238 ; H01L29/49 ; H01L29/423 ; H01L27/092

Abstract:
Semiconductor structures and fabrication methods thereof are provided. An exemplary fabrication method includes providing a base substrate having an N-type logic region including a first and a second N-type threshold voltage region, a P-type logic region including a first and a second P-type threshold voltage region, a pull-up transistor region and an adjacent pull-down transistor region; forming a gate dielectric layer; forming a first work function layer on the gate dielectric layer; removing portions of the first work function layer; forming a second work function layer on remaining first work function layer and exposed portions of the gate dielectric layer; removing a portion of the second work function layer; forming an N-type work function layer on remaining second work function layer and exposed portion of the gate dielectric layer in the second N-type threshold voltage region; and forming a gate electrode layer on the N-type work function layer.
Public/Granted literature
- US20190139970A1 SEMICONDUCTOR STRUCTURE Public/Granted day:2019-05-09
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