Invention Grant
- Patent Title: Semiconductor device and manufacturing method of the same
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Application No.: US15297211Application Date: 2016-10-19
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Publication No.: US10411056B2Publication Date: 2019-09-10
- Inventor: Koji Iizuka
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-262828 20121130
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00

Abstract:
There are provided a highly reliable semiconductor device capable of suppressing occurrence of cracks as well as securing flatness and a manufacturing method therefor. The semiconductor device includes: a semiconductor substrate; an element region; and a non-element region. The non-element region includes: a top-layer metal wiring in a top layer of metal wirings formed in the non-element region; a flattening film covering an upper surface of the top-layer metal wiring; and a protecting film formed over the flattening film. A removed part where the protecting film is removed is formed in at least part of the non-element region.
Public/Granted literature
- US20170040356A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2017-02-09
Information query
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