Invention Grant
- Patent Title: Drive apparatus
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Application No.: US15265288Application Date: 2016-09-14
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Publication No.: US10411182B2Publication Date: 2019-09-10
- Inventor: Ryohei Uchino , Osamu Torayashiki , Akio Mugishima
- Applicant: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Applicant Address: JP Hyogo
- Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
- Current Assignee Address: JP Hyogo
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP2014-068601 20140328
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B81B3/00 ; G02B26/08 ; H01L41/047 ; H01L41/083

Abstract:
A mirror device 200 disclosed herein includes a base 202, a mirror 205, an actuator 206, a fixed comb electrode 208, and a movable comb electrode 207. The movable comb electrode 207 includes: a beam portion 271; a hinge 273 configured to couple the beam portion 271 to the actuator 206 and having lower rigidity than the beam portion 271; a hinge 274 configured to couple the beam portion 271 to the base 202 and having lower rigidity than the beam portion 271; and electrode fingers 272, 272, . . . provided for the beam portion 271 and facing electrode fingers 281, 281, . . . of the fixed comb electrode 208. The movable comb electrode 207 is configured to tilt around a tilt axis B5 that passes through the hinge 274.
Public/Granted literature
- US20170005257A1 DRIVE APPARATUS Public/Granted day:2017-01-05
Information query
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