Invention Grant
- Patent Title: Method of fabricating surface-emitting laser
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Application No.: US15934359Application Date: 2018-03-23
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Publication No.: US10416227B2Publication Date: 2019-09-17
- Inventor: Ryosuke Kubota
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka
- Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2017-112697 20170607
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01S5/00 ; G01R31/27 ; H01S5/42 ; H01S5/022 ; H01S5/042

Abstract:
A method of fabricating a surface-emitting laser includes the steps of fabricating a substrate product including device sections, a pad electrode, and a conductor, each of the device sections including a surface-emitting laser having an electrode, the conductor connecting the pad electrode to the electrode across a boundary of the device sections; attaching a connection device to the substrate product, the connection device including a probe device having a probe and a probe support base having an opening; performing a burn-in test of the surface-emitting lasers by applying electric power to the pad electrode through the probe at a high temperature; and after the burn-in test, separating the substrate product into semiconductor chips. The burn-in test includes a step of monitoring light emitted by the surface-emitting laser through the opening during the burn-in test, and a step of selecting the surface-emitting lasers based on a monitoring result.
Public/Granted literature
- US20180356459A1 METHOD OF FABRICATING SURFACE-EMITTING LASER Public/Granted day:2018-12-13
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