Invention Grant
- Patent Title: Spectral feature control apparatus
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Application No.: US15295280Application Date: 2016-10-17
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Publication No.: US10416471B2Publication Date: 2019-09-17
- Inventor: Eric Anders Mason
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B27/14 ; G02B27/12 ; G02B5/04 ; G02B27/42 ; H01L21/027 ; H01S3/00 ; H01S3/23 ; G01J3/06 ; G01J3/14 ; G01J3/18 ; H01S3/08 ; G03F7/20 ; G01J3/12 ; H01S3/225

Abstract:
A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.
Public/Granted literature
- US20180107017A1 SPECTRAL FEATURE CONTROL APPARATUS Public/Granted day:2018-04-19
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