Invention Grant
- Patent Title: Method to reduce line waviness
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Application No.: US15936385Application Date: 2018-03-26
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Publication No.: US10416550B2Publication Date: 2019-09-17
- Inventor: Joseph R. Johnson , Christopher Dennis Bencher , Thomas L. Laidig
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G03F1/38
- IPC: G03F1/38 ; G03F7/20 ; G03F1/70

Abstract:
Embodiments disclosed herein relate to an exposure pattern alteration software application which manipulates exposure polygons having lines with angles substantially close to angles of symmetry of a hex close pack arrangement, which suffer from long jogs. Long jogs present themselves as high edge placement error regions. As such, the exposure pattern alteration software application provides for line wave reduction by serrating polygon edges at affected angles to reduce edge placement errors during maskless lithography patterning in a manufacturing process.
Public/Granted literature
- US20180217491A1 METHOD TO REDUCE LINE WAVINESS Public/Granted day:2018-08-02
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