Invention Grant
- Patent Title: Holding apparatus, exposure apparatus and manufacturing method of device
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Application No.: US15671533Application Date: 2017-08-08
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Publication No.: US10416573B2Publication Date: 2019-09-17
- Inventor: Tomoki Miyakawa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2011-035412 20110222
- Main IPC: G03B27/62
- IPC: G03B27/62 ; G03F7/20

Abstract:
A holding apparatus includes a holding portion that includes a first member which contacts a portion of an object, a second member which at least a portion thereof is fixed to a base, and a connection member which is configured to connect the first and second members, and a driving unit which drives the holding portion to change at least a posture of the first member, wherein a relative positional relationship between the first member and the second member is changed via the connection member.
Public/Granted literature
- US20170357163A1 HOLDING APPARATUS, EXPOSURE APPARATUS AND MANUFACTURING METHOD OF DEVICE Public/Granted day:2017-12-14
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