Invention Grant
- Patent Title: Storing and organizing minimum contact area features and wafer transfer pins during system maintenance
-
Application No.: US15214943Application Date: 2016-07-20
-
Publication No.: US10418269B2Publication Date: 2019-09-17
- Inventor: Terrence George Bernier , Joseph Wei
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: H01L21/687
- IPC: H01L21/687 ; B65D25/10 ; H01L21/67 ; H01L21/673

Abstract:
A tray for storing minimum contact area (MCA) components of a substrate processing system includes a first compartment including at least one of a first lift pin tray and a first plurality of holes. The first lift pin tray includes a plurality of slots configured to retain lift pins of the substrate processing system. The first plurality of holes is configured to receive MCA pins of the substrate processing system. A first cup is arranged adjacent to the first compartment. The first cup includes a wall at least partially surrounding the first cup, the wall separates the first cup from the first compartment, and an upper edge of the wall extends above a bottom surface of the first compartment.
Public/Granted literature
Information query
IPC分类: