A substrate, a thin film transistor array substrate, and a manufacturing method are provided. The substrate includes a main plate, a first film layer, a second film layer, and an insulation layer. The first film layer is disposed on the main plate, and is provided with at least two recesses. The insulation layer is disposed on the first film layer. The second film layer is disposed on the insulation layer and provided with at least two protrusions facing the insulation layer. The amount of stress accumulated is effectively reduced after the substrate is heated.