Invention Grant
- Patent Title: Self aligned replacement metal source/drain finFET
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Application No.: US15136238Application Date: 2016-04-22
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Publication No.: US10418450B2Publication Date: 2019-09-17
- Inventor: Emre Alptekin , Robert R. Robison , Reinaldo A Vega
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Steven Meyers
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/66 ; H01L29/40 ; H01L29/06 ; H01L29/45 ; H01L29/78

Abstract:
A fin-shaped field effect transistor (finFET) device comprising includes a substrate, an insulating layer displaced over the substrate, and a fin. The device also includes a gate formed over the fin, the gate including: a gate stack; and a high-k dielectric on opposing side of the gate stack. The device further includes metallic source and drain regions formed over the fin and on opposing sides of the gate.
Public/Granted literature
- US20170141197A1 SELF ALIGNED REPLACEMENT METAL SOURCE/DRAIN FINFET Public/Granted day:2017-05-18
Information query
IPC分类: