Invention Grant
- Patent Title: Silicidation of bottom source/drain sheet using pinch-off sacrificial spacer process
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Application No.: US15716719Application Date: 2017-09-27
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Publication No.: US10418462B2Publication Date: 2019-09-17
- Inventor: Brent A. Anderson , Huiming Bu , Terence B. Hook , Fee Li Lie , Junli Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Gibbons Gutman Bongini Bianco PL
- Agent Thomas S. Grzesik
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L29/66 ; H01L21/8234 ; H01L29/78 ; H01L29/08

Abstract:
A vertical fin field-effect-transistor and a method for fabricating the same. The vertical fin field-effect-transistor includes at least a substrate, a first source/drain layer, and a plurality of fins each disposed on and in contact with the first source/drain layer. Silicide regions are disposed within a portion of the first source/drain layer. A gate structure is in contact with the plurality of fins, and a second source/drain layer is disposed on the gate structure. The method includes forming silicide in a portion of a first source/drain layer. A first spacer layer is formed in contact with at least the silicide, the first source/drain layer and the plurality of fins. A gate structure is formed in contact with the plurality of fins and the first spacer layer. A second spacer layer is formed in contact with the gate structure and the plurality of fins.
Public/Granted literature
- US20180019323A1 SILICIDATION OF BOTTOM SOURCE/DRAIN SHEET USING PINCH-OFF SACRIFICIAL SPACER PROCESS Public/Granted day:2018-01-18
Information query
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