Invention Grant
- Patent Title: Surface emitting laser, information acquiring apparatus, imaging apparatus, laser array, and method of manufacturing surface emitting laser
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Application No.: US15538362Application Date: 2015-12-08
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Publication No.: US10418784B2Publication Date: 2019-09-17
- Inventor: Koichiro Nakanishi , Yasuhiro Nagatomo
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JP2014-265572 20141226; JP2015-222514 20151112
- International Application: PCT/JP2015/006108 WO 20151208
- International Announcement: WO2016/103604 WO 20160630
- Main IPC: H01S5/183
- IPC: H01S5/183 ; G02F1/1335 ; H01S5/04 ; H01S5/42 ; G01B9/02
Abstract:
A surface emitting laser having a wide wavelength tunable band is provided.A surface emitting laser includes a first reflecting mirror (102); a second reflecting mirror (116); and an active layer (104) arranged between the first reflecting mirror (102) and the second reflecting mirror (116), a gap being formed between the second reflecting mirror (116) and the active layer (104), an oscillation wavelength being tunable. The second reflecting mirror (116) includes a beam (108) comprising a single-crystal semiconductor, and a dielectric multilayer film (110) supported by the beam (108), and the dielectric multilayer film (110) is arranged in an opening (118) formed in the beam (108).
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