Invention Grant
- Patent Title: Method of manufacturing polishing pad
-
Application No.: US15534828Application Date: 2016-04-06
-
Publication No.: US10421845B2Publication Date: 2019-09-24
- Inventor: Seung-Geun Kim , Hak-Su Kang , Jeong-Seon Choo , Dae-Han Jung , Gi-Young Park
- Applicant: KPX CHEMICAL CO., LTD.
- Applicant Address: KR Seoul
- Assignee: KPX CHEMICAL CO., LTD.
- Current Assignee: KPX CHEMICAL CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Hauptman Ham, LLP
- International Application: PCT/KR2016/003562 WO 20160406
- International Announcement: WO2017/175894 WO 20171012
- Main IPC: B24B37/24
- IPC: B24B37/24 ; C08J9/06 ; B29C44/34 ; B29C44/56 ; B29C69/00 ; C08G18/48 ; C08G18/76 ; C08J9/12 ; C08J9/14 ; C08G18/12 ; B29K75/00 ; B29L31/00 ; B29K105/00 ; B29K105/24

Abstract:
A method of manufacturing a polishing pad includes producing an urethane prepolymer having a viscosity of 20,000 cps (at 25° C.) to 40,000 cps (at 25° C.) by mixing a plurality of polymers, mixing the urethane prepolymer with an inert gas and a low-boiling blowing agent having a boiling point of 60° C. to 150° C., and manufacturing a polishing layer including porous pores by causing a mixture produced at the mixing to be subjected to gelation and curing in a predetermined cast.
Public/Granted literature
- US10457790B2 Method of manufacturing polishing pad Public/Granted day:2019-10-29
Information query