- Patent Title: Systems, methods and apparatus for choked flow element extraction
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Application No.: US15243815Application Date: 2016-08-22
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Publication No.: US10424460B2Publication Date: 2019-09-24
- Inventor: Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma source includes a ring plasma chamber, a primary winding around an exterior of the ring plasma chamber, multiple ferrites, wherein the ring plasma chamber passes through each of the ferrites and multiple plasma chamber outlets coupling the plasma chamber to a process chamber. Each one of the plasma chamber outlets having a respective plasma restriction. A system and method for generating a plasma are also described.
Public/Granted literature
- US20160358754A1 Systems, Methods and Apparatus for Choked Flow Element Extraction Public/Granted day:2016-12-08
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