Invention Grant
- Patent Title: Smart RF pulsing tuning using variable frequency generators
-
Application No.: US15457798Application Date: 2017-03-13
-
Publication No.: US10424467B2Publication Date: 2019-09-24
- Inventor: Katsumasa Kawasaki
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67

Abstract:
Methods and systems for RF pulse reflection reduction are provided herein. In some embodiments, a method includes (a) receiving a process recipe for processing the substrate that includes a plurality of pulsed RF power waveforms from a plurality of RF generators during a first duty cycle, (b) dividing the first duty cycle into a plurality of equal time intervals, (c) for each RF generator, determining a frequency command set for all intervals and send the frequency command set to the RF generator, wherein the frequency command set includes a frequency set point for each of the intervals in the plurality of equal time intervals, and (d) providing a plurality of RF power waveforms from a plurality of RF generators to a process chamber during a first duty cycle according to the frequency command set sent to each RF generator.
Public/Granted literature
- US20180261430A1 SMART RF PULSING TUNING USING VARIABLE FREQUENCY GENERATORS Public/Granted day:2018-09-13
Information query