Invention Grant
- Patent Title: Integrating a planar field effect transistor (FET) with a vertical FET
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Application No.: US15938860Application Date: 2018-03-28
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Publication No.: US10424516B2Publication Date: 2019-09-24
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Sherman IP LLP
- Agent Kenneth L. Sherman; Hemavathy Perumal
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8234 ; H01L27/088 ; H01L29/78 ; H01L21/265 ; H01L21/306 ; H01L21/308 ; H01L21/768 ; H01L29/66 ; H01L21/285 ; H01L23/535 ; H01L29/423 ; H01L29/786

Abstract:
One embodiment provides a method of integrating a planar field-effect transistor (FET) with a vertical FET. The method comprises masking and etching a semiconductor of the vertical FET to form a fin, and providing additional masking, additional etching, doping and depositions to isolate a bottom source/drain (S/D) region. A dielectric is formed on the bottom S/D region to form a spacer. The method further comprises depositing gate metals, etching a vertical gate for the vertical FET and a planar gate for the planar FET using a shared gate mask, depositing dielectric, etching the dielectric to expose one or more portions of the fin, growing epitaxy on a top S/D region, masking and etching S/D contact openings for the bottom S/D region, forming silicide regions in S/D regions, depositing contact metal in the silicide regions to form contacts, and planarizing the contacts.
Public/Granted literature
- US20180218948A1 INTEGRATING A PLANAR FIELD EFFECT TRANSISTOR (FET) WITH A VERTICAL FET Public/Granted day:2018-08-02
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