Invention Grant
- Patent Title: Hermetically sealed molecular spectroscopy cell with buried ground plane
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Application No.: US15697505Application Date: 2017-09-07
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Publication No.: US10424523B2Publication Date: 2019-09-24
- Inventor: Adam Joseph Fruehling , Juan Alejandro Herbsommer , Simon Joshua Jacobs , Benjamin Stassen Cook
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L23/08
- IPC: H01L23/08 ; B81C1/00 ; H01L21/768

Abstract:
A method for forming a sealed cavity includes bonding a non-conductive structure to a first substrate to form a non-conductive aperture into the first substrate. On a surface of the non-conductive structure opposite the first substrate, the method includes depositing a first metal layer. The method further includes patterning a first iris in the first metal layer, depositing a first dielectric layer on a surface of the first metal layer opposite the non-conductive structure, and patterning an antenna on a surface of the first dielectric layer opposite the first metal layer. The method also includes creating a cavity in the first substrate, depositing a second metal layer on a surface of the cavity, patterning a second iris in the second metal layer, and bonding a second substrate to a surface of the first substrate opposite the non-conductive structure to thereby seal the cavity.
Public/Granted literature
- US20190074233A1 HERMETICALLY SEALED MOLECULAR SPECTROSCOPY CELL WITH BURIED GROUND PLANE Public/Granted day:2019-03-07
Information query
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