Invention Grant
- Patent Title: Capacitor, image sensor circuit and fabrication methods thereof
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Application No.: US15849265Application Date: 2017-12-20
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Publication No.: US10424610B2Publication Date: 2019-09-24
- Inventor: Xin Liang , Chong Wang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201611198711 20161222
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/66 ; H01L29/94 ; H01G9/048 ; H01G9/07 ; H01L21/762 ; H01L49/02

Abstract:
A capacitor, an image sensor circuit and fabricating methods are provided. The method includes providing a base substrate including a trench region and a body region adjacent to the trench region. The method also includes forming a first trench structure and a second trench structure on the first trench structure, in the base substrate in the trench region. In addition, the method includes forming a dielectric layer on a sidewall surface and a bottom surface of the first trench structure and an electrode layer on the dielectric layer in the first trench structure. Further, the method includes forming an isolation layer filling the second trench structure.
Public/Granted literature
- US20180182791A1 CAPACITOR, IMAGE SENSOR CIRCUIT AND FABRICATION METHODS THEREOF Public/Granted day:2018-06-28
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