Invention Grant
- Patent Title: Solid-state imaging device, manufacturing method of solid-state imaging device, and imaging system
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Application No.: US15631391Application Date: 2017-06-23
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Publication No.: US10424613B2Publication Date: 2019-09-24
- Inventor: Hiromasa Tsuboi , Fumihiro Inui , Masahiro Kobayashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2016-143096 20160721
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H01L27/146

Abstract:
A solid-state imaging device has: a counter dope region of a first conductivity type which is formed so as to surround a drain region of a transfer transistor of the solid-state imaging device and in which impurity concentration of the first conductivity type is lower than that of the drain region; and an isolating region of a second conductivity type which is formed in a deep region below channel regions of a plurality of transistors and in which impurity concentration of the second conductivity type is higher than that of a well region, wherein a depth position of a lower surface of the counter dope region is deeper than a depth position of a lower surface of a buried channel region.
Public/Granted literature
- US20180026073A1 SOLID-STATE IMAGING DEVICE, MANUFACTURING METHOD OF SOLID-STATE IMAGING DEVICE, AND IMAGING SYSTEM Public/Granted day:2018-01-25
Information query
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