Invention Grant
- Patent Title: Vertical tunneling field-effect transistor cell and fabricating the same
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Application No.: US15797674Application Date: 2017-10-30
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Publication No.: US10424652B2Publication Date: 2019-09-24
- Inventor: Harry-Hak-Lay Chuang , Cheng-Cheng Kuo , Ming Zhu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/739 ; H01L29/06

Abstract:
A tunneling field-effect transistor (TFET) device is disclosed. A protrusion structure is disposed over the substrate and protrudes out of the plane of substrate. Isolation features are formed on the substrate. A drain region is disposed over the substrate adjacent to the protrusion structure and extends to a bottom portion of the protrusion structure as a raised drain region. A drain contact is disposed over the drain region and overlap with the isolation feature.
Public/Granted literature
- US20180069096A1 Vertical Tunneling Field-Effect Transistor Cell and Fabricating the Same Public/Granted day:2018-03-08
Information query
IPC分类: