Invention Grant
- Patent Title: MSM ultraviolet ray receiving element, MSM ultraviolet ray receiving device
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Application No.: US16003591Application Date: 2018-06-08
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Publication No.: US10424684B2Publication Date: 2019-09-24
- Inventor: Akira Yoshikawa , Kazuhiro Nagase , Motoaki Iwaya , Saki Ushida
- Applicant: ASAHI KASEI KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2017-116187 20170613
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L31/0256 ; H01L31/112 ; H01L31/02 ; H01L31/0224 ; H01L31/0304 ; H01L31/108

Abstract:
An MSM ultraviolet ray receiving element has a low dark state current value and a good photosensitivity. The MSM ultraviolet ray receiving element has a first nitride semiconductor layer on a substrate, a second nitride semiconductor layer on the first nitride semiconductor layer, and first and second electrodes on the second nitride semiconductor layer. The first nitride semiconductor layer contains AlXGa(1-X)N (0.4≤X≤0.90). The second nitride semiconductor layer contains AlYGa(1-Y)N with a film thickness t (nm) satisfying 5≤t≤25. The first electrode and the second electrode contain a material containing at least three elements of Ti, Al, Au, Ni, V, Mo, Hf, Ta, W, Nb, Zn, Ag, Cr, and Zr. Al composition ratios X and Y and a film thickness t satisfy −0.009×t+X+0.22−0.03≤Y≤−0.009×t+X+0.22+0.03.
Public/Granted literature
- US20180358500A1 MSM ULTRAVIOLET RAY RECEIVING ELEMENT, MSM ULTRAVIOLET RAY RECEIVING DEVICE Public/Granted day:2018-12-13
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