Invention Grant
- Patent Title: Capacitive transducer and acoustic sensor
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Application No.: US15901841Application Date: 2018-02-21
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Publication No.: US10425743B2Publication Date: 2019-09-24
- Inventor: Takashi Kasai , Yusuke Nakagawa
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2016-047307 20160310
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R19/04 ; H04R1/22 ; H04R7/16 ; B81B3/00 ; H01L29/84

Abstract:
A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being deformable to have a deformation converted into a change in capacitance between the vibration electrode film and the back plate, the vibration electrode film having a through-hole as a pressure relief hole, and a protrusion integral with and formed from the same member as the back plate, the protrusion being placeable in the pressure relief hole before the vibration electrode film deforms. The pressure relief hole and the protrusion have a gap therebetween defining an airflow channel as a pressure relief channel. The protrusion has a through-hole extending from a distal portion of the protrusion to a portion of the back plate opposite to the protrusion.
Public/Granted literature
- US20180184211A1 CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR Public/Granted day:2018-06-28
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