Invention Grant
- Patent Title: Polishing apparatus and polishing method
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Application No.: US15478459Application Date: 2017-04-04
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Publication No.: US10427269B2Publication Date: 2019-10-01
- Inventor: Makoto Kashiwagi , Michiyoshi Yamashita
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2016-078491 20160408
- Main IPC: B24B9/06
- IPC: B24B9/06 ; B24B21/00 ; B24B49/16 ; B24B51/00

Abstract:
A polishing apparatus which can maintain a polishing load within an appropriate range is disclosed. The polishing apparatus includes: a pressing member for pressing a polishing tool against the substrate; an actuator configured to control a pressing force of the pressing member; a positioning member which is movable together with the pressing member; a stopper arranged to restrict movement of the pressing member and the positioning member; a stopper moving mechanism configured to move the stopper in a predetermined direction; a polishing-load detector configured to obtain a load feedback value which varies according to a polishing load applied to the pressing member; and a stopper-speed determining device configured to determine a movement speed of the stopper which can allow the load feedback value to fall within a set range.
Public/Granted literature
- US20170291273A1 POLISHING APPARATUS AND POLISHING METHOD Public/Granted day:2017-10-12
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