Invention Grant
- Patent Title: Method of processing nano- and micro-pores
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Application No.: US16221457Application Date: 2018-12-15
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Publication No.: US10427936B2Publication Date: 2019-10-01
- Inventor: Yun Chen , Xin Chen , Dachuang Shi , Jian Gao , Zhengping Wang , Haidong Yang
- Applicant: Guangdong University of Technology
- Applicant Address: CN Guangzhou
- Assignee: Guangdong University of Technology
- Current Assignee: Guangdong University of Technology
- Current Assignee Address: CN Guangzhou
- Agency: Wayne & Ken, LLC
- Agent Tony Hom
- Priority: CN201711349542 20171215
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B82Y40/00 ; H01L21/306 ; H01L29/06

Abstract:
A method of processing nano- and micro-pores includes washing a substrate and cleaning a surface of the substrate; spin-coating photoresist, exposing the substrate and developing to form the substrate with a pattern; 3. depositing micro-nano metal particles on the surface of the substrate; wherein the micro-nano metal particles are centered on a magnetic core; and the surface of the magnetic core is plated with a metal nano-particle coating composed of a plurality of gold, silver or aluminum nanoparticles; removing the photoresist, and maintaining dot arrays of the micro-nano metal particles; applying laser irradiation and a strong uniform magnetic field on the substrate, so that the substrate is processed to form processed structures; and after the processed structures being formed into nano-/micro-pores with targeted pore size, shape and depth, stopping the laser irradiation and removing the strong uniform magnetic field.
Public/Granted literature
- US20190185319A1 METHOD OF PROCESSING NANO- AND MICRO-PORES Public/Granted day:2019-06-20
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