Invention Grant
- Patent Title: Thermal driven MEMS tunable filter
-
Application No.: US15830834Application Date: 2017-12-04
-
Publication No.: US10429634B2Publication Date: 2019-10-01
- Inventor: Guanghai Jin , Congshun Wang , Jing Zhao
- Applicant: Agiltron, Inc.
- Applicant Address: US MA Woburn
- Assignee: Agiltron, Inc.
- Current Assignee: Agiltron, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Shifrin Patent Law
- Agent Dan Shifrin
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G01J3/26 ; G02B6/293

Abstract:
A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.
Public/Granted literature
- US20190171001A1 THERMAL DRIVEN MEMS TUNABLE FILTER Public/Granted day:2019-06-06
Information query