Invention Grant
- Patent Title: Permanent dielectric compositions containing photoacid generator and base
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Application No.: US15364316Application Date: 2016-11-30
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Publication No.: US10429734B2Publication Date: 2019-10-01
- Inventor: Pramod Kandanarachchi
- Applicant: PROMERUS, LLC
- Applicant Address: US OH Brecksville
- Assignee: PROMERUS, LLC
- Current Assignee: PROMERUS, LLC
- Current Assignee Address: US OH Brecksville
- Agency: Balaram Gupta
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/40 ; G03F7/038 ; G03F7/039 ; C08F8/12 ; C08F8/14 ; G03F7/32 ; G03F7/38 ; H01L21/02 ; H01L21/311

Abstract:
Embodiments encompassing a series of compositions containing photoacid generator (PAG) and a base are disclosed and claimed. The compositions are useful as permanent dielectric materials. More specifically, embodiments encompassing compositions containing a series of copolymers of a variety of norbornene-type cycloolefinic monomers and maleic anhydride in which maleic anhydride is fully or partially hydrolyzed (i.e., ring opened and fully or partially esterified), PAG and a base, which are useful in forming permanent dielectric materials having utility in a variety of electronic material applications, among various other uses, are disclosed.
Public/Granted literature
- US20170153546A1 PERMANENT DIELECTRIC COMPOSITIONS CONTAINING PHOTOACID GENERATOR AND BASE Public/Granted day:2017-06-01
Information query
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