Invention Grant
- Patent Title: Method of recovering resist pattern
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Application No.: US15071055Application Date: 2016-03-15
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Publication No.: US10429740B2Publication Date: 2019-10-01
- Inventor: Junichi Tsuchiya , Rikita Tsunoda , Daichi Takaki , Miki Shinomiya , Masafumi Fujisaki
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2015-056437 20150319
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/32

Abstract:
A method of recovering a defect portion of a resist pattern formed on a substrate including applying a shrinking agent composition so as to cover the resist pattern having the defect portion; forming a developing solution-insoluble region on the surface of the resist pattern; and developing the covered resist pattern, the shrinking agent composition including a polymeric compound (X) which is a homopolymer or a random copolymer.
Public/Granted literature
- US20160274464A1 METHOD OF RECOVERING RESIST PATTERN Public/Granted day:2016-09-22
Information query
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