A semiconductor device includes a flag generation circuit and a write operation circuit. The flag generation circuit generates an error scrub flag if an error scrub operation is performed. The write operation circuit controls a write operation in response to the error scrub flag. The error scrub operation includes an internal read operation for outputting read data from a cell array, a data correction operation for correcting an error included in the read data to generate corrected data, and an internal write operation for storing the corrected data into the cell array.