Invention Grant
- Patent Title: Method of detecting defects in an object
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Application No.: US15655796Application Date: 2017-07-20
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Publication No.: US10430938B2Publication Date: 2019-10-01
- Inventor: Amit Batikoff , Doron Portnoy
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G06T5/50 ; G06T5/00 ; G06K9/62

Abstract:
A method, system, and computer program product of detecting defects in an object using a processor operatively connected to a memory, the method comprising: accommodating in the memory an image group comprising a reference image and an image; generating a set of correction parameters to be applied to pixels of an image from the image group, wherein the parameters are determined to minimize a combination of a first factor indicative of variability of the set, and a second factor indicative of a difference between an image from the image group as enhanced by applying the set and another image in the image group, wherein the combination increases as any factor increases; applying the set to the image of the image group to obtain an enhanced image; generating an optimal difference image between the enhanced image and the other image; and using the optimal difference image for detecting defect candidates.
Public/Granted literature
- US20190026879A1 METHOD OF DETECTING DEFECTS IN AN OBJECT Public/Granted day:2019-01-24
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