Invention Grant
- Patent Title: Titanium target for sputtering and manufacturing method thereof
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Application No.: US14771519Application Date: 2014-03-03
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Publication No.: US10431438B2Publication Date: 2019-10-01
- Inventor: Shiro Tsukamoto
- Applicant: JX Nippon Mining & Metals Corporation
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2013-043904 20130306
- International Application: PCT/JP2014/055226 WO 20140303
- International Announcement: WO2014/136702 WO 20140912
- Main IPC: C23C14/34
- IPC: C23C14/34 ; H01J37/34 ; C22C14/00 ; C22F1/00 ; C22F1/18

Abstract:
A high-purity titanium target for sputtering having a purity of 5N5 (99.9995%) or higher, wherein the high-purity titanium target has no macro pattern on the target surface. An object of this invention is to provide a high-quality titanium target for sputtering, in which impurities causing particles and abnormal discharge phenomena are reduced, and which is free from fractures and cracks even during high-rate sputtering, and capable of stabilizing the sputtering characteristics, effectively inhibiting the generation of particles during deposition, and improving the uniformity of deposition.
Public/Granted literature
- US20160005576A1 TITANIUM TARGET FOR SPUTTERING AND MANUFACTURING METHOD THEREOF Public/Granted day:2016-01-07
Information query
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