Invention Grant
- Patent Title: Substrate conveyance robot and substrate detection method
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Application No.: US15570226Application Date: 2016-04-21
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Publication No.: US10431482B2Publication Date: 2019-10-01
- Inventor: Hirohiko Goto
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Applicant Address: JP Kobe-shi
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe-shi
- Agency: Oliff PLC
- Priority: JP2015-090814 20150427
- International Application: PCT/JP2016/062687 WO 20160421
- International Announcement: WO2016/175133 WO 20161103
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/67 ; B25J9/06 ; H01L21/677 ; B25J9/04 ; B25J9/16 ; B25J11/00 ; B25J15/00 ; H01L21/683 ; H01L21/687
Abstract:
A substrate conveyance robot is provided with a robot arm capable of elevating; a substrate holding device mounted to the robot arm; and a substrate detection unit for detecting a substrate held by the substrate holding device. The substrate detection unit has a substrate sensor for detecting the substrate and a sensor elevating unit for scanning a region including a position where the substrate is arranged by elevating the substrate sensor without elevating the robot arm. Thus, the substrate in a device provided with an opening having a small dimension can be detected without hindrance while preventing collision of the robot and the device.
Public/Granted literature
- US20180130693A1 SUBSTRATE CONVEYANCE ROBOT AND SUBSTRATE DETECTION METHOD Public/Granted day:2018-05-10
Information query
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