Invention Grant
- Patent Title: Lift pin and method for manufacturing same
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Application No.: US15556167Application Date: 2016-01-22
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Publication No.: US10431488B2Publication Date: 2019-10-01
- Inventor: Sung Hee Yoon , Kwon Ho Jung
- Applicant: KOMICO CO., LTD.
- Applicant Address: KR Anseong-si, Gyeonggi-Do
- Assignee: KOMICO CO., LTD.
- Current Assignee: KOMICO CO., LTD.
- Current Assignee Address: KR Anseong-si, Gyeonggi-Do
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2015-0037961 20150319
- International Application: PCT/KR2016/000687 WO 20160122
- International Announcement: WO2016/148385 WO 20160922
- Main IPC: C30B25/12
- IPC: C30B25/12 ; H01L21/687 ; C23C16/24 ; C23C16/458 ; C23C16/46 ; C30B29/06 ; H01L21/205
Abstract:
A lift pin passes through a hole of a susceptor on which a wafer is placed inside a process chamber in which an epitaxial process is performed with respect to the wafer, to support the wafer, and has a surface formed of a glassy carbon material.
Public/Granted literature
- US20180053683A1 LIFT PIN AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-02-22
Information query
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