Invention Grant
- Patent Title: Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface
-
Application No.: US15429525Application Date: 2017-02-10
-
Publication No.: US10431505B2Publication Date: 2019-10-01
- Inventor: Jun-bum Park , Kyung-sik Kang , Byeong-hwan Jeon , Jae-chol Joo , Tae-joong Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce P.L.C.
- Priority: KR10-2016-0070310 20160607
- Main IPC: G01J3/42
- IPC: G01J3/42 ; H01L21/66 ; G01N21/27 ; G01N21/95 ; G01N21/956 ; H01L21/3205 ; G01N21/552 ; G01J3/28 ; G01N21/25
Abstract:
Manufacturing a device may include inspecting a surface of an inspection target device. The inspecting may include forming a metal layer on a surface of the inspection target device on which a minute pattern is formed, directing a beam of light to be incident and normal to the surface of the inspection target device, determining a spectrum of light reflected from the surface of the inspection target device, and generating, via the spectrum, information associated with a structural characteristic of the minute pattern formed on the inspection target device. The inspection target device may be selectively incorporated into the manufactured device based on the generated information.
Public/Granted literature
- US20170352599A1 INSPECTING SURFACES Public/Granted day:2017-12-07
Information query
